Development of metal etch mask by single layer lift-off for silicon nitride photonic crystals
Publication Details
- Authors
- Publication Type
- Journal Article
- Year of Publication
- 2011
- Journal
- Microelectronic Engineering
- Volume
- 88
- Issue
- 6
- Date Published
- 06/2011
- Publisher
- Elsevier BV
- Pagination
- 994-998
- ISSN
- 0167-9317