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Evidence for hydrogen two-level systems in atomic layer deposition oxides, M.. S. Khalil, M.. J. A. Stoutimore, S.. Gladchenko, A.. M. Holder, C.. B. Musgrave, A.. C. Kozen, G.. Rubloff, Y.. Q. Liu, R.. G. Gordon, J.. H. Yum, et al. , APPLIED PHYSICS LETTERS, 103 (2013)