| Title | Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding |
| Publication Type | Journal Article |
| Year of Publication | 2014 |
| Authors | S. R. D. Thomson, J. K. Perron, M. O. Kimball, S. Mehta, and F. M. Gasparini |
| Journal | JOVE-JOURNAL OF VISUALIZED EXPERIMENTS |
| Date Published | JAN |
| ISSN | 1940-087X |
| DOI | 10.3791/51179 |
