Title | Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding |
Publication Type | Journal Article |
Year of Publication | 2014 |
Authors | S. R. D. Thomson, J. K. Perron, M. O. Kimball, S. Mehta, and F. M. Gasparini |
Journal | JOVE-JOURNAL OF VISUALIZED EXPERIMENTS |
Date Published | JAN |
ISSN | 1940-087X |
DOI | 10.3791/51179 |